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MicroElectroMechanical systems (MEMS) is the technology of very small electromechanical devices. MEMS uses fabrication technologies including molding and plating, wet etching and dry etching (RIE and DRIE), electro discharge machining (EDM), and other technologies capable of manufacturing very small devices. MEMS technology can be implemented using a number of different materials and manufacturing techniques including, Silicon, polymer and metal.
The following is a list of members who are
currently marketing their products to the MEM's industry:
Company |
Website Link |
Products/Services |
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| Busch UK |
www.busch.co.uk |
Manufacturer of vacuum pumps and systems,
Busch supplies solutions and service for vacuum pumps and applications worldwide
Excellent technical support and service backup
Local sales and workshop facilities in Telford, Shropshire and East Kilbride, Scotland
Decontamination facilities
24/7 support |
Compugraphics |
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lithography, photomask, reticle, pellicle, image |
Dupont |
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o-rings, seals, deposition, etch,thermal |
Norcal Ltd |
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Vacuum components, flanges and fittings,
Foreline traps, valves, heater jackets, |
Oxford Instruments |
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Etch Deposition & Growth |
SAFC Hi tech |
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Advanced chemicals for silicon semiconductor and compound semiconductor development and manufacturing. Ultra-pure materials to support specialised performance chemicals applications. Delivery systems and level sensor equipment. |
| Plasma Therm |
www.plasmatherm.com |
Certified Pre-owned products, Versaline,Vision Series, LAPCVD, Versalock Mask Eycher Series, Process Control, Productivity Enhanced, Award winning service and support. |
Southampton Nano |
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devices, gyroscopes, CMOS circuitry, planar optical circuits, particle manipulators. |
SPS |
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handling, megasonic, cassettes, pumps, flowmeters |
Silson |
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Pfeiffer Vacuum |
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Pfeiffer Vacuum offers turbo pumps, backing pumps, pumping stations and measurement equipment for the following applications: Coating, CVD processes, lithography, etching, and implantation processes. Further application options include process chamber transfer, wafer transport or electron microscopy (SEM and SLM). Pfeiffer Vacuum benefits with innovative and most reliable products from this positive development in this highly dynamic market segment. |
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